{"id":3118,"date":"2022-08-23T14:46:44","date_gmt":"2022-08-23T07:46:44","guid":{"rendered":"https:\/\/techconvina.com\/en\/?post_type=product&p=3118"},"modified":"2022-08-26T15:40:22","modified_gmt":"2022-08-26T08:40:22","slug":"cobra-semicon-dry-screw-vacuum-pumps","status":"publish","type":"product","link":"https:\/\/techconvina.com\/en\/product\/cobra-semicon-dry-screw-vacuum-pumps\/","title":{"rendered":"COBRA (SEMICON) Dry Screw Vacuum Pumps"},"content":{"rendered":"\t\t
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Operating principle<\/span><\/p>

Inside COBRA Semicon dry screw vacuum pumps, two screw rotors rotate in opposite directions. The pumped medium is trapped between the cylinder and the screw chambers. There, it is compressed, and transported to the outlet. During this process, the screw rotors do not come in contact with each other or the cylinder.<\/p>

COBRA BC<\/span><\/h1><\/div>

The ideal solution for light to medium semiconductor applications\"cobra_bc_1000_f\"<\/b><\/p>

  • Advanced screw design<\/li>
  • Dry and contact-free operating principle<\/li>
  • Unique \u201cflying bearing\u201d design<\/li>
  • Cantilever construction<\/li>
  • Compact fit-in-place design<\/li>
  • Direct water cooling<\/li>
  • Fully open communication protocol<\/li><\/ul>

    Benefits of the COBRA BC series<\/span><\/h2>

    COBRA BC vacuum pumps are perfectly suited for tasks in\u00a0load lock and transfer chambers.<\/b>\u00a0Further applications are among others metrology, lithography, physical vapor deposition, rapid thermal annealing, and silicon etch.<\/p>

    The patented self-balancing screw design ensures the lowest vibration levels and\u00a0quiet operation.<\/b><\/p>

    The screws of COBRA BC vacuum pumps are manufactured from a single-piece casting avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus,\u00a0corrosion and deposition are prevented.<\/b><\/p>

    COBRA BC vacuum pumps feature a bell-shaped cantilever construction: The twin-rotor with variable pitch screws is mounted only on the motor side. Thanks to the unique \u201cflying bearing\u201d design, inlet bearings are unnecessary. Therefore, the pumped medium does not come in contact with the bearings. This ensures\u00a0clean vacuum<\/b>\u00a0generation and allows for the full recovery of the pumped medium.<\/p>

    COBRA BC series vacuum pumps use efficient\u00a0direct water cooling<\/b>. An even temperature distribution throughout the pump body is therefore maintained. Moreover, thermal stability during the process is ensured.<\/p>

    The\u00a0fully open communication protocol<\/b>\u00a0(Modbus TCP-IP) allows controlling all functionalities. This includes idle modes and variable speed drive. The communication protocol can easily be adapted to a specific network protocol using standard interface components.<\/p>

    A directly mounted, the canned motor makes the dimensions of the COBRA BC series very compact. Due to their\u00a0fit-in-place design<\/b>, they can be easily and quickly retrofitted to existing systems.<\/p>

    Video: How COBRA BC vacuum pumps work<\/span><\/h2>