Ultimate pressure:
0.01 hPa (mbar)
Nominal pumping speed:
min. 100.0 m³/h max. 165.0 m³/h

Description

PRODUCT LEAFLET


THE IDEAL SOLUTION FOR LIGHT TO MEDIUM SEMICONDUCTOR APPLICATIONS

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling, idle mode capabilities

Compact

Fit-in-place design, directly mounted canned motor


Technical specifications

ISO 50 Hz

COBRA BC 0100/0200 F


Dimensional drawing

COBRA BC 0100/0200 F

COBRA BC 0100/0200 F


Pumping speed

Air at 20 °C. Tolerance: ± 10%

COBRA BC 0100/0200 F


Markets & applications

Reviews

There are no reviews yet.

Be the first to review “COBRA BC 0100/0200 F”

Your email address will not be published. Required fields are marked *