Ultimate pressure:
0.003 hPa (mbar)
Nominal pumping speed:
min. 930.0 m³/h max. 1580.0 m³/h

Description

PRODUCT LEAFLET


THE IDEAL SOLUTION FOR LIGHT TO MEDIUM SEMICONDUCTOR APPLICATIONS

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame


Technical specifications

ISO 50 Hz

COBRA BC 1000/2000 F


Dimensional drawing

COBRA BC 1000/2000 F

COBRA BC 1000/2000 F


Pumping speed

Air at 20 °C. Tolerance: ± 10%

COBRA BC 1000/2000 F


Markets & applications

Semiconductor production

         Medium

Solar power industry

         Physical vapor deposition (PVD)

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