Description
PRODUCT LEAFLET
LEAK-TIGHT VACUUM GENERATION FOR DEMANDING PROCESSES
High performance
Advanced screw design, patented self-balancing screws, perfectly suited for coating applications, helium pumping or fluorination
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient water cooling
Leak-tight design
Integrated motor, no contamination of process gases, gas-tight
Technical specifications
ISO 50 Hz
Dimensional drawing
COBRA NS 0070–0600 C
Pumping speed
Air at 20 °C. Tolerance: ± 10%
Markets & applications
Analytics and R&D
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Particle accelerators
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Beamline
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Coating
Metallurgy
Coating
Solar power industry
Plasma-enhanced chemical vapor deposition (PECVD)
Design options
ATEX – for use in explosion hazard areas.
