High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling, idle mode capabilities

Compact

Fit-in-place design, directly mounted canned motor

Technical specifications

ISO 50 Hz

Dimensional drawing

COBRA BC 0100/0200 F

Pumping speed

Air at 20 °C. Tolerance: ± 10%