High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for cold atomic layer deposition processes, load lock and transfer chambers, metrology, lithography, physical vapor deposition, rapid thermal annealing and etching processes like oxide, silicon and metal

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, direct water cooling

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame

Technical specifications

ISO 50 Hz

Dimensional drawing

COBRA BC 0601–1200 A/G

Pumping speed

Air at 20 °C. Tolerance: ± 10%