Ultimate pressure:
0.001 hPa (mbar)
Nominal pumping speed:
955.0 m³/h

Description

PRODUCT LEAFLET


THE IDEAL SOLUTION FOR LIGHT TO MEDIUM SEMICONDUCTOR APPLICATIONS

High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, integrated vacuum booster, perfectly suited for tasks in load lock and transfer chambers

Efficient

Latest Busch VacBoost technology, low cost of ownership, minimal maintenance, high uptime, direct water cooling, intelligent idle mode

Compact

Fit-in-place design, directly mounted canned motor


Technical specifications

ISO 50 Hz

COBRA BC 1000 F Premium Efficiency


Dimensional drawing

COBRA BC 1000 F Premium Efficiency

COBRA BC 1000 F Premium Efficiency


Pumping speed

Air at 20 °C. Tolerance: ± 10%

COBRA BC 1000 F Premium Efficiency


Markets & applications

Semiconductor production

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