Nominal pumping speed:
min. 1200.0 m³/h max. 1700.0 m³/h

Description

PRODUCT LEAFLET


THE NEW GENERATION OF DRY VACUUM PUMPS FOR DEMANDING PROCESSES

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for solar, flat panel and semiconductor applications and harsh processes with high gas temperatures, such as etch and CVD, excellent powder handling, tantal coated screw for harsh applications

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, high hydrogen throughput, low energy consumption, variable temperature control

Compact

Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, low vibration level


Technical specifications

ISO 50 Hz

COBRA DS 1200/1800 A/A H


Dimensional drawing

COBRA DS 1200/1800 A/A H

COBRA DS 1200/1800 A/A H


Pumping speed

Air at 20 °C. Tolerance: ± 10%


Markets & applications

Flat panel display production

  1. Plasma-enhanced chemical vapor deposition (PECVD)
  2. Load lock chambers
  3. Organic light-emitting diode (OLED)
  4. Physical vapor deposition (PVD)
Lithium ion battery production

         Degassing
Semiconductor production

  1. Medium
  2. Harsh
  3. Light
Solar power industry

         Plasma-enhanced chemical vapor deposition (PECVD)

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