COBRA DS 5161–9161 A/B/F

Nominal pumping speed:
min. 4200.0 m³/h max. 6160.0 m³/h

Categories: , , ,
COBRA DS 3181 B
COBRA DS 8162/8163 B/F

Description

PRODUCT LEAFLET

THE NEW GENERATION OF DRY VACUUM PUMPS FOR DEMANDING PROCESSES

High performance

Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition

Efficient

Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient indirect water cooling, high hydrogen throughput

Compact

Fit-in-place design, directly mounted canned motor

Technical specifications

ISO 50 Hz

COBRA DS 5161–9161 A/B/F

Dimensional drawing

COBRA DS 5161–9161 A/B/F

COBRA DS 5161–9161 A/B/F

Pumping speed

Air at 20 °C. Tolerance: ± 10%

COBRA DS 5161–9161 A/B/F

Markets & applications

Flat panel display production

  1. Plasma-enhanced chemical vapor deposition (PECVD)
  2. Load lock chambers
  3. Organic light-emitting diode (OLED)
  4. Physical vapor deposition (PVD)
Lithium ion battery production

         Degassing
Semiconductor production

  1. Medium
  2. Harsh
  3. Light
Solar power industry

         Plasma-enhanced chemical vapor deposition (PECVD)

Downloads

Instruction Manual COBRA DS 5161 A EN

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