Description
PRODUCT LEAFLET
THE NEW GENERATION OF DRY VACUUM PUMPS FOR DEMANDING PROCESSES
High performance
Advanced screw design, excellent running qualities, integrated vacuum booster, perfectly suited for high-capacity load lock and coating processes
Efficient
Low cost of ownership, minimal maintenance, long service intervals, high uptime, efficient water cooling, high solvent throughput
Compact
Fit-in-place design, directly mounted canned motor, backing pump and vacuum booster combined on a compact base frame, modular design
Technical specifications
ISO 50 Hz
Dimensional drawing
COBRA DS 8162/8163 B/F
Pumping speed
Air at 20 °C. Tolerance: ± 10%
Markets & applications
Flat panel display production
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Plasma-enhanced chemical vapor deposition (PECVD)
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Load lock chambers
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Organic light-emitting diode (OLED)
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Physical vapor deposition (PVD)
Lithium ion battery production
Degassing
Semiconductor production
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Medium
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Light
