Reliable

Specially designed for demanding EPI processes, powerful venturi unit, patented gas inlet clogging preventer, no trapping of by-products before abatement necessary (honey trap)

Minimal maintenance

Extended service intervals, high uptime, easy servicing, fast service routine, no dismantling necessary

Efficient

Proven wet scrubber technology, low operating costs, built-in water recirculation system, easy operation through PLC with color touch screen

Technical specifications

ISO 50 Hz

Dimensional drawing

GABA AWE 050 AE