Description
PRODUCT LEAFLET
THE COMPACT AND ENERGY-EFFICIENT SOLUTION FOR LOAD LOCK CHAMBERS
Flexible
Shortest pump-down time for load lock chambers
Efficient
Extremely low energy consumption, minimal maintenance, high uptime
Compact
Exceptionally small and light-weight
Technical specifications
ISO 50 Hz
Dimensional drawing
TORRI BD 0100–0600 A
Pumping speed
Air at 20 °C. Tolerance: ± 10%