Ultimate pressure:
0.01 hPa (mbar)
Nominal pumping speed:
min. 100.0 m³/h max. 600.0 m³/h

Description

PRODUCT LEAFLET


THE COMPACT AND ENERGY-EFFICIENT SOLUTION FOR LOAD LOCK CHAMBERS

Flexible

Shortest pump-down time for load lock chambers

Efficient

Extremely low energy consumption, minimal maintenance, high uptime

Compact

Exceptionally small and light-weight


Technical specifications

ISO 50 Hz

TORRI BD 0100–0600 A


Dimensional drawing

TORRI BD 0100–0600 A

TORRI BD 0100–0600 A


Pumping speed

Air at 20 °C. Tolerance: ± 10%

TORRI BD 0100–0600 A


Markets & applications

Semiconductor production

         Light