High performance

Advanced screw design, bell-shaped construction, patented self-balancing screws, excellent running qualities, perfectly suited for tasks in load lock and transfer chambers, metrology, lithography, physical vapor deposition and rapid thermal annealing

Efficient

Intelligent variable speed drive, low cost of ownership, minimal maintenance, high uptime, direct water cooling

Compact

Fit-in-place design, directly mounted canned motor, integrated control panel

Technical specifications

ISO 50 Hz

Dimensional drawing

COBRA BC 0101 G

Pumping speed

Air at 20 °C. Tolerance: ± 10%